Keithley 4200A-SCS Parameter Analyzer
Keithley 4200A-SCS Parameter Analyzer
Accelerate research, reliability and failure analysis studies of semiconductor devices, materials and process development with the 4200A-SCS. The highest performance parameter analyzer, it delivers synchronizing current-voltage (I-V), capacitance-voltage (C-V) and ultra-fast pulsed I-V measurements.
(I-V) Range
10 aA - 1A
0.2 µV - 210 V
(C-V) Range
1 kHz - 10 MHz
± 30V DC bias
Range
±40 V (80 V p-p), ±800 mA
200 MSa/sec, 5 ns sampling rate
Parametric insight, fast and clear.

Making connections to your bold discoveries has never been easier. The 4200A-SCS Parameter Analyzer reduces characterization complexity and test setup by up to 50%, providing clear, uncompromised measurement and analysis capability. Plus, embedded measurement expertise—an industry first—provides test guidance and gives you supreme confidence in your results.
Highlights
- Built-in measurement videos in English, Chinese, Japanese, and Korean
- Jump start your testing with hundreds of user-modifiable application tests
- Automated real-time parameter extraction, data graphing, arithmetic functions
Measure. Switch. Repeat.

The 4200A-CVIV Multi-Switch automatically switches between I-V and C-V measurements without re-cabling or lifting the prober tips. Unlike competing products, the four-channel 4200A-CVIV display provides local visual insight for quick test setup and easy troubleshooting when unexpected results occur.
Highlights
- Move C-V measurement to any device terminal without re-cabling
- User-configurable for low current capability
- Personalize the names of output channels
- View real-time test status
Characterize. Customize. Maximize.

Put simply, the 4200A-SCS is completely customizable and fully upgradeable so you can perform electrical characterization and evaluation of semiconductor devices, new materials, active/passive components, wafer level reliability, failure analysis, electrochemistry or virtually any type of sample.
Highlights
- NBTI/PBTI testing
- Random telegraph noise
- Non-volatile memory devices
- Potentiostat application tests
Integrated solution with analytical probers and cryogenic controllers.

The 4200A-SCS Parameter Analyzer supports many manual and semi-automated wafer probers and cryogenic temperature controllers, including Cascade MicroTech, Lucas Labs/Signatone, MicroManipulator, Wentworth Laboratories, MicroManipulator, LakeShore Model 336 cryogenic temperature controller.
Highlights
- "Point and click" test sequencing
- "Manual" prober mode tests prober functionality
- Fake prober mode enables debugging without removing commands
Models
| Model | Current-Voltage (I-V) Range | Capacitance-Voltage (C-V) Range | Pulsed I-V Range | List Price |
|---|---|---|---|---|
| 4200A-SCS |
10 aA - 1A 0.2 µV – 210 V |
1 kHz – 10 MHz ± 30V DC bias |
±40 V (80 V p-p), ±800 mA 200 MSa/sec, 5 ns sampling rate | Configure & Quote |
| Model | Current-Voltage (I-V) Range | Capacitance-Voltage (C-V) Range | Pulsed I-V Range | List Price |
|---|---|---|---|---|
| 4200A-SCS |
10 aA - 1A 0.2 µV – 210 V |
1 kHz – 10 MHz ± 30V DC bias |
±40 V (80 V p-p), ±800 mA 200 MSa/sec, 5 ns sampling rate | Configure & Quote |
Semiconductor Reliability

Perform complex reliability tests while letting the 4200A-SCS take care of the complex coding. Included projects like Hot Carrier Injection Degradation (HCI) give you a jump start on device analysis.
Evaluating Hot Carrier Induced Degradation of MOSFET Devices
Highlights
- Combine DC I-V, C-V, and pulse measurements in one set of tests
- Included support for many probe stations and external instruments
- Easy to use cycling system allows repeat measurements without coding
C-V Measurement for High Impedance Applications

Use Keithley’s custom Very Low Frequency C-V Technique to analyze the capacitance of your high resistance sample. This technique is performed using only source measure unit (SMU) instruments but can be combined with a 4210-CVU to perform higher frequency measurements as well.
Tips and Techniques to Simplilfy MOSFET/MOSCAP Device Characterization
Highlights
- .01 to 10 Hz frequency range with sensitivity of 1 pF to 10 nF
- 3½-digit typical resolution, minimum typical of 10 fF
Non-volatile Memory

Put your new technologies to the test with thorough pulsed I-V characterization. The 4200A-SCS comes with support and ready-to-run tests for the latest in NVRAM technologies from floating gate flash to ReRAM and FeRAM. Dual sourcing and measuring capabilities in current and voltage allow both transient and I-V domain characterization.
Pulse I-V Characterization of Non-Volatile Memory Technologies
VCSEL Testing

Multiple, concurrent source measure unit (SMU) instruments in the 4200A-SCS simplify your laser diode testing. Generate LIV (Light intensity-Current-Voltage) curves with connections to only a single box. Advanced probe station and switch support means you can use the same instrument for on-wafer production testing of individual diodes or entire arrays. SMUs can be configured for up to 21 W capabilities for a variety of continuous wave (CW) VCSEL applications.
Nanoscale Device Characterization

The integrated instrument capabilities of the 4200A-SCS simplify the measurement requirements in developing nanoscale electronics such as carbon nanotubes. Start your investigations from a preconfigured test project and expand your work from there. A pulsed source mode for SMUs helps reduce overheating problems can be combined with low voltage C-V and ultra-fast pulsed DC measurements in seconds.
Electrical Characterization of Carbon Nanotube Transistors (CNT FETs)
Resistivity of Materials

Use a 4200A-SCS with integrated SMUs to easily measure resistivity using a four-point collinear probe or van der Pauw method. Included tests perform repetitive van der Pauw calculations automatically, saving you valuable research time. A maximum current resolution of 10aA and input impedance of >1016 ohms give you more accurate and precise results.
van der Pauw and Hall Voltage Measurements with the 4200A-SCS Parameter Analyzer
MOSFET Characterization

The 4200A-SCS can hold all the instruments necessary for full characterization of MOS devices through component or on-wafer testing. Included tests and projects solve for oxide thickness of a MOSCap, threshold voltages, doping concentration, mobile ion concentration, and more. All these tests can be run at the touch of a button from a single instrument box.
C‑V Characterization of MOS Capacitors Using the 4200A-SCS Parameter Analyzer
| Datasheet | Model | Description | Pricing |
|---|---|---|---|
| View Datasheet | 4200A-SCS-PK1 High Resolution IV |
210V/100mA, 0.1 fA resolution For two- and three-terminal devices, MOSFET, CMOS characterization Package 4200A-SCS-PK1 includes:
|
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| View Datasheet | 4200A-SCS-PK2 High Resolution IV & CV |
210V/100mA, 0.1 fA resolution, 1kHz - 10MHz For high κ dielectric, deep submicron CMOS characterization Package 4200A-SCS-PK2 includes:
|
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| View Datasheet | 4200A-SCS-PK3 High Resolution and Power IV & CV |
210V/1A, 0.1 fA resolution, 1kHz - 10MHz For power devices, high κ dielectric, deep submicron CMOS device characterization Package 4200A-SCS-PK3 includes:
|
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| View Datasheet | 4200-BTI-A Ultra-fast NBTI/PBTI |
For sophisticated NBTI and PBTI measurements on leading-edge silicon CMOS technology Package 4200-BTI-A includes:
|
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| Data Sheet | Module | Description |
|---|---|---|
| 4200-BTI-A | ULTRA FAST BTI PKG | |
| 4200-PA | REMOTE PREAMPLIFIER MODULE | |
| 4200-SMU | MEDIUM POWER SOURCE-MEASURE UNIT | |
| 4200A-CVIV | I-V/C-V MULTI-SWITCH MODULE | |
| 4210-CVU | CAPACITANCE-VOLTAGE UNIT | |
| 4210-SMU | HIGH POWER SOURCE-MEASURE UNIT | |
| 4220-PGU | HIGH VOLTAGE PULSE GENERATOR UNIT | |
| 4225-PMU | ULTRA-FAST PULSE MEASURE UNIT | |
| 4225-RPM | REMOTE PREAMPLIFIER/SWITCH MODULE |
| Title | Type | Date |
|---|---|---|
| Switching Between C-V and I-V Measurements Using the 4200A-CVIV Multi-Switch and 4200A-SCS Parameter Analyzer This application note describes how to easily make I-V and C-V measurements on the same device without the need to change cables, which could potentially introduce errors or damage devices. Literature number: 1KZ-60635-0 | Application Note | 30 Oct 2017 |
| Model 4200A-RM Rack Mount Kit Installation Instructions This document contains installation instructions for the Model 4200A-RM Rack-Mount Kit, a fixed rack-mount kit for cabinet mounting of the Keithley 4200A-SCS Semiconductor Characterization System. Model 4200A-RM Rack Mount Kit Installation Instructions Part number: 071348701 | 19 Oct 2017 | |
| Model 4200A Parameter Analyzer User's Manual This User's Manual includes specific applications to help you get started quickly. Part number: 4200A-900-01B | Primary User | 28 Aug 2017 |
| Model 4200A-SCS-PK2 Parameter Analyzer Quick Start Guide The Quick Start Guide for the Keithley Instruments 4200A-SCS-PK2 provides unpacking and basic connection information. It also provides sample tests that you can use to familiarize yourself with the Parameter Analyzer. Part number: 4200A-PK2-903-01A | Primary User | 28 Aug 2017 |
| Model 4200A-SCS Package 3 System Quick Start Guide The Quick Start Guide for the Keithley Instruments 4200A-SCS-PK3 provides unpacking and basic connection information. It also provides step-by-step examples to allow you to familiarize yourself with the Parameter Analyzer. Part number: 4200A-PK3-903-01A | Primary User | 28 Aug 2017 |
| Model 4200A-SCS Semiconductor Characterization System Quick Start Guide Brief introduction to the Keithley Instruments 4200A-SCS Parameter Analyzer, including unpacking and initial connection information. Part number: 4200A-903-01A | Primary User | 28 Aug 2017 |
| Model 4200-Compiler Installation Instructions Installation instructions for the Model 4200-Compiler, a compiler that you can use to create user modules for the 4200A-SCS Parameter Analyzer and the 4200-SCS. Part number: PA-1030E | Combined User/Service | 28 Aug 2017 |
| Modèle 4200A-SCS Liste d'Avertissements List of documentation warnings for the Canadian market that are in both English and French. Part number: 077126000 | User | 28 Aug 2017 |
| Model 4200-SCS Semiconductor Characterization System Declassification and Security Instructions If you have data security concerns, this document tells you how to clear or sanitize the Keithley Instruments Model 4200-SCS Semiconductor Characterization System's memory devices. It also explains how to declassify an instrument that is not functioning. Part number: 077134300 | Declassification | 28 Aug 2017 |
| Model 4200A-SCS Declassification and Security Instructions If you have data security concerns, this document tells you how to clear or sanitize the Keithley Instruments Model 4200A-SCS Parameter Analyzer's memory devices. It also explains how to declassify an instrument that is not functioning. Part number: 077126200 | Declassification | 28 Aug 2017 |