Keithley 4200A-SCS Parameter Analyzer

Keithley 4200A-SCS Parameter Analyzer

Accelerate research, reliability and failure analysis studies of semiconductor devices, materials and process development with the 4200A-SCS. The highest performance parameter analyzer, it delivers synchronizing current-voltage (I-V), capacitance-voltage (C-V) and ultra-fast pulsed I-V measurements.

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DC Current-Voltage
(I-V) Range

10 aA - 1A
0.2 µV - 210 V

Capacitance-Voltage
(C-V) Range

1 kHz - 10 MHz
± 30V DC bias

Pulsed I-V
Range

±40 V (80 V p-p), ±800 mA
200 MSa/sec, 5 ns sampling rate

 

Keithley 4200A-SCS Parameter Analyzer

Parametric insight, fast and clear.

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Making connections to your bold discoveries has never been easier. The 4200A-SCS Parameter Analyzer reduces characterization complexity and test setup by up to 50%, providing clear, uncompromised measurement and analysis capability. Plus, embedded measurement expertise—an industry first—provides test guidance and gives you supreme confidence in your results.

Highlights

  • Built-in measurement videos in English, Chinese, Japanese, and Korean
  • Jump start your testing with hundreds of user-modifiable application tests
  • Automated real-time parameter extraction, data graphing, arithmetic functions

Measure. Switch. Repeat.

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The 4200A-CVIV Multi-Switch automatically switches between I-V and C-V measurements without re-cabling or lifting the prober tips. Unlike competing products, the four-channel 4200A-CVIV display provides local visual insight for quick test setup and easy troubleshooting when unexpected results occur.

Highlights

  • Move C-V measurement to any device terminal without re-cabling
  • User-configurable for low current capability
  • Personalize the names of output channels
  • View real-time test status

Characterize. Customize. Maximize.

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Put simply, the 4200A-SCS is completely customizable and fully upgradeable so you can perform electrical characterization and evaluation of semiconductor devices, new materials, active/passive components, wafer level reliability, failure analysis, electrochemistry or virtually any type of sample.

Highlights

  • NBTI/PBTI testing
  • Random telegraph noise
  • Non-volatile memory devices
  • Potentiostat application tests

Integrated solution with analytical probers and cryogenic controllers.

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The 4200A-SCS Parameter Analyzer supports many manual and semi-automated wafer probers and cryogenic temperature controllers, including Cascade MicroTech, Lucas Labs/Signatone, MicroManipulator, Wentworth Laboratories, LakeShore Model 336 cryogenic temperature controller.

Highlights

  • "Point and click" test sequencing
  • "Manual" prober mode tests prober functionality
  • Fake prober mode enables debugging without removing commands

Cut Costs and Protect Your Investment

Keithley Care plans provide fast, high-quality services at a fraction of the cost of on-demand service events. You are one click or phone call away from obtaining repair coverage - no quotes, purchase orders, or approval delays.

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Datasheet Model Description Pricing
View Datasheet 4200A-SCS-PK1
High Resolution IV
210V/100mA, 0.1 fA resolution
For two- and three-terminal devices, MOSFET, CMOS characterization Package 4200A-SCS-PK1 includes:
  • 4200A-SCS parameter analyzer
  • (2) 4200-SMU Module
  • (1) 4200-PA Preamp
  • (1) 8101-PIV Test fixture with sample devices
Request a Quote
View Datasheet 4200A-SCS-PK2
High Resolution IV & CV
210V/100mA, 0.1 fA resolution, 1kHz - 10MHz
For high κ dielectric, deep submicron CMOS characterization Package 4200A-SCS-PK2 includes:
  • 4200A-SCS parameter analyzer
  • (2) 4200-SMU Module
  • (1) 4200-PA Preamp
  • (1) 4210-CVU Capacitance-Voltage Module
  • (1) 8101-PIV Test fixture with sample devices
Request a Quote
View Datasheet 4200A-SCS-PK3
High Resolution and Power IV & CV
210V/1A, 0.1 fA resolution, 1kHz - 10MHz
For power devices, high κ dielectric, deep submicron CMOS device characterization Package 4200A-SCS-PK3 includes:
  • 4200A-SCS parameter analyzer
  • (2) 4200-SMU Module
  • (2) 4210-SMU
  • (1) 4200-PA Preamp
  • (1) 4210-CVU Capacitance-Voltage Module
  • (1) 8101-PIV Test fixture with sample devices
Request a Quote
View Datasheet 4200-BTI-A
Ultra-fast NBTI/PBTI
For sophisticated NBTI and PBTI measurements on leading-edge silicon CMOS technology Package 4200-BTI-A includes:
  • (1) 4225-PMU Ultra-Fast I-V Module
  • (2) 4225-RPM Remote Preamplifier/Switch Modules
  • Automated Characterization Suite (ACS) Software
  • Ultra-Fast BTI Test Project Module
  • Cabling
Request a Quote

Semiconductor Reliability

Perform complex reliability tests while letting the 4200A-SCS take care of the complex coding. Included projects like Hot Carrier Injection Degradation (HCI) give you a jump start on device analysis.

Highlights

  • Combine DC I-V, C-V, and pulse measurements in one set of tests
  • Included support for many probe stations and external instruments
  • Easy to use cycling system allows repeat measurements without coding

C-V Measurement for High Impedance Applications

Use Keithley’s custom Very Low Frequency C-V Technique to analyze the capacitance of your high resistance sample. This technique is performed using only source measure unit (SMU) instruments but can be combined with a 4210-CVU to perform higher frequency measurements as well.

Highlights

  • .01 to 10 Hz frequency range with sensitivity of 1 pF to 10 nF
  • 3½-digit typical resolution, minimum typical of 10 fF

Non-volatile Memory

Put your new technologies to the test with thorough pulsed I-V characterization. The 4200A-SCS comes with support and ready-to-run tests for the latest in NVRAM technologies from floating gate flash to ReRAM and FeRAM. Dual sourcing and measuring capabilities in current and voltage allow both transient and I-V domain characterization.

VCSEL Testing

Multiple, concurrent source measure unit (SMU) instruments in the 4200A-SCS simplify your laser diode testing. Generate LIV (Light intensity-Current-Voltage) curves with connections to only a single box. Advanced probe station and switch support means you can use the same instrument for on-wafer production testing of individual diodes or entire arrays. SMUs can be configured for up to 21 W capabilities for a variety of continuous wave (CW) VCSEL applications.

Nanoscale Device Characterization

The integrated instrument capabilities of the 4200A-SCS simplify the measurement requirements in developing nanoscale electronics such as carbon nanotubes. Start your investigations from a preconfigured test project and expand your work from there. A pulsed source mode for SMUs helps reduce overheating problems can be combined with low voltage C-V and ultra-fast pulsed DC measurements in seconds.

Resistivity of Materials

Use a 4200A-SCS with integrated SMUs to easily measure resistivity using a four-point collinear probe or van der Pauw method. Included tests perform repetitive van der Pauw calculations automatically, saving you valuable research time. A maximum current resolution of 10aA and input impedance of >10­­­­16 ohms give you more accurate and precise results.

MOSFET Characterization

The 4200A-SCS can hold all the instruments necessary for full characterization of MOS devices through component or on-wafer testing. Included tests and projects solve for oxide thickness of a MOSCap, threshold voltages, doping concentration, mobile ion concentration, and more. All these tests can be run at the touch of a button from a single instrument box.

Data Sheet Module Description Configure and Quote
4200-BTI-A ULTRA FAST BTI PKG Configure & Quote
4200-PA REMOTE PREAMPLIFIER MODULE Configure & Quote
4200-SMU MEDIUM POWER SOURCE-MEASURE UNIT Configure & Quote
4200A-CVIV I-V/C-V MULTI-SWITCH MODULE Configure & Quote
4210-CVU CAPACITANCE-VOLTAGE UNIT Configure & Quote
4210-SMU HIGH POWER SOURCE-MEASURE UNIT Configure & Quote
4220-PGU HIGH VOLTAGE PULSE GENERATOR UNIT Configure & Quote
4225-PMU ULTRA-FAST PULSE MEASURE UNIT Configure & Quote
4225-RPM REMOTE PREAMPLIFIER/SWITCH MODULE Configure & Quote
4200-SMU-R FIELD REPLACEABLE MPSMU Configure & Quote
4210-SMU-R FIELD REPLACEABLE HPSMU Configure & Quote
TECHNIQUES FOR MEASURING RESISTIVITY FOR MATERIALS CHARACTERIZATION
4200A-SCS PARAMATER ANALYZER APPLICATIONS GUIDEThis Materials Characterization Applications Guide offers tips and techniques for choosing between the Four-Point Collinear Probe or van Der Pauw methods for your resistivity measurements based on the type, shape, and thickness of your material and the…
Literature number: 1KW-60826-0
Application Note 10 Nov 2018
4200A-SCS Clarius+ Software Suite V1.5
This version of Clarius+ is only supported on Microsoft Windows 10. If installed on the 4200A-SCS system with a Clarius+ release prior to V1.4, contact Keithley, a Tektronix company, at tek.com to upgrade the parameter analyzer.If installing on a personal…
Part number: 4200A-CLARIUS-V1.5
Application
4200-SCS KTEI V9.1 Service Pack 2

Part number: 4200-KTEI-V9.1SP2
Application
4200A-SCS Parameter Analyzer Datasheet

Literature number: 1KW-60780-4
Datasheet
Using the Ramp Rate Method for Making Quasistatic C-V Measurements with the 4200A-SCS Parameter Analyzer
This application note describes how to implement and optimize quasistatic C-V measurements using the 4200A-SCS and the ramp rate method.
Literature number: 1KW-60639-0
Application Note 10 Nov 2018
van der Pauw and Hall Voltage Measurements with the 4200A-SCS Parameter Analyzer
This application note explains how to make resistivity measurements of semiconductor materials using the 4200A-SCS and the van der Pauw method.
Literature number: 1KW-60641-0
Application Note 10 Nov 2018
DC I-V and AC Impedance Testing of Organic FETs
This application note outlines how to optimize DC I-V and AC impedance measurements on OFETs using the 4200A-SCS Parameter Analyzer. Timing parameters, noise reduction, shielding, proper cabling, and other important measurement considerations for…
Literature number: 1KZ-61313-0
Application Note 10 Nov 2018
Model 4200A-SCS-PK2 Parameter Analyzer Quick Start Guide
The Quick Start Guide for the Keithley Instruments 4200A-SCS-PK2 provides unpacking and basic connection information. It also provides sample tests that you can use to familiarize yourself with the Parameter Analyzer.
Part number: 4200A-PK2-903-01A
Primary User
Model 4200A-SCS Clarius V1.4.1 Software Release Notes The Clarius+ software application suite is the software for the 4200A-SCS.…
Part number: 077132605
C‑V Characterization of MOS Capacitors Using the 4200A-SCS Parameter Analyzer
This application note discusses how to use a Keithley 4200A-SCS Parameter Analyzer equipped with the 4210-CVU Integrated C-V Option to make C‑V measurements on MOS capacitors. It also addresses the basic principlesof MOS caps, performing C‑V measurements…
Literature number: 1KW-60645-0
Application Note 10 Nov 2018
TECHNIQUES FOR MEASURING RESISTIVITY FOR MATERIALS CHARACTERIZATION
4200A-SCS PARAMATER ANALYZER APPLICATIONS GUIDEThis Materials Characterization Applications Guide offers tips and techniques for choosing between the Four-Point Collinear Probe or van Der Pauw methods for your resistivity measurements based on the type, shape, and thickness of your material and the…
Literature number: 1KW-60826-0
Application Note 10 Nov 2018
Model 4200A-SCS Semiconductor Characterization System Quick Start Guide
Brief introduction to the Keithley Instruments 4200A-SCS Parameter Analyzer, including unpacking and initial connection information.
Part number: 4200A-903-01A
Primary User
Model 4200-SCS Semiconductor Characterization System Declassification and Security Instructions
If you have data security concerns, this document tells you how to clear or sanitize the Keithley Instruments Model 4200-SCS Semiconductor Characterization System's memory devices. It also explains how to declassify an instrument that is not functioning.
Part number: 077134300
Declassification
Performing Very Low Frequency Capacitance-Voltage Measurements on High Impedance Devices Using the 4200A-SCS Parameter Analyzer
This application note describes the VLF C-V technique, explains how to make connections to the device under test (DUT,) shows how to use the provided software, and describes optimizing VLF C-V measurements using the Keithley 4200A-SCS Parameter Analyzer.
Literature number: 1KW-60644-0
Application Note 10 Nov 2018
An Ultra-Fast Single Pulse (UFSP) Technique for Channel Effective Mobility Measurement
This application note describes a novel Ultra-Fast Single Pulse technique (UFSP) [4, 5] for accurate mobility evaluation, including the technique principle, how to connect the device, and how to use the Clarius software in the 4200A-SCS Parameter Analyzer…
Literature number: 1KW-60643-0
Application Note 10 Nov 2018
Optimizing Low Current Measurements with the 4200A-SCS Parameter Analyzer
This application note describes Keithley’s best known methods and recommendations for optimizing low current measurements using the 4200A-SCS.
Literature number: 1KW-60636-0
Application Note 10 Nov 2018
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