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Automating High and Low Frequency C-V Measurements and Interface Trap Density (DIT) Calculations of MOS Capacitors Using the 4200A-SCS Parameter Analyzer

This application note discusses how to use the 4200A-SCS Parameter Analyzer to measure and to automatically switch between high and low frequency C-V measurements on MOS capacitors. Basic information on MOS capacitors and common parameter extractions is also discussed.